Mooc

VACUUM TECHNOLOGY

Mechanical and static pumps

Course begins on 15 October 2016

40-30 provides online training courses for professional and personal development in vacuum technology which is important for industry, science and our society.

Vacuum pumps are widely used in the microelectronic industry for plasma-enhanced devices, for chemical vapour deposition, and for plasma etching of silicon wafer. This online course introduces learners to topics like vacuum definition, vacuum ranges, production of vacuum different kinds of vacuum pumps and their functioning principles etc.

This module is part of the following training paths:

- Vacuum physics and technology: level 1 and 2
- Troubleshooting on vacuum pumping systems
- First level maintenance for vacuum systems
- Best use of vacuum systems
- Gas pumping system
- NDT Leak testing Level 1, 2 and 3 - tracer gas and pressure change methods

Course objectives

Understand the different technologies of vacuum pumps and their functioning principles.

Respect the different conditions of use of different pumps: starting pressure, ultimate vacuum and debit.

Audience

Everyone who wants to deepen his knowledge of vacuum technology and pumping system: industrial, maintenance personnel, university, R&D centre, candidate of COFREND seal...

Pedagogy

Trainer Dr Michel THIAM, engineer-researcher of 40-30, with more than 20 years of experience in the design of equipment related to the ultra-vacuum.

Program

Primary pumps

CHAPTER 1

Vacuum ranges
The scales of vacuum
Production of vacuum – the pumping system
Pressure of use of vacuum pumps
Primary pumps: functioning principles, starting pressure, ultimate vacuum and flow
Primary oil pumps
Two-stage principle
Oscillating piston pumps Dry pumps
Dry piston pumps
Principle of beaks
Dry screw pumps
Volumetric spiral pumps
Depressants roots

Flow pumps

CHAPTER 3

Principles of functioning and use
Characteristics: priming pressure, pumping
flow and pressure limit
Explanation of synoptic
Fractionating diffusion pumps
Baffles and cold traps

Secondary pumps

CHAPTER 2

Turbo molecular pumps and molecular pumps
Overview
Conception and functioning
Operating ranges, their use and selection criteria
Discharge pressure, pumping flow and pressure limit
Hybrid pumps
Their use, discharge pressure, pumping flow and pressure limit

Sorption pumps

CHAPTER 4

Physical technology and phenomena
Functioning principles
Characteristics: priming pressure, pumping flow and pressure limit
Triode pumps
Functioning principles
Getter or titanium sublimation
Principle and characteristics
Synoptic, vacuum limit, flow
Sorption pumps
Principles and physical phenomena